{"id":4913,"date":"2000-01-01T00:00:00","date_gmt":"2000-01-01T08:00:00","guid":{"rendered":"https:\/\/wpdev.hmc.edu\/physics\/2000\/01\/01\/a-method-for-beating-the-diffraction-limit-in-photolithography\/"},"modified":"2000-01-01T00:00:00","modified_gmt":"2000-01-01T08:00:00","slug":"a-method-for-beating-the-diffraction-limit-in-photolithography","status":"publish","type":"physics_clinic","link":"https:\/\/www.hmc.edu\/physics\/research\/clinic\/projects\/a-method-for-beating-the-diffraction-limit-in-photolithography\/","title":{"rendered":"A Method for Beating the Diffraction Limit in Photolithography"},"content":{"rendered":"<h2><span id=\"clinic-sponsor\">Etec Systems, Inc.<\/span><br \/>\n<span id=\"clinic-year\">2000\u201301<\/span><\/h2>\n<p>Etec Systems, Inc. is a worldwide leader in the designing, manufacturing, and marketing of mask-making solutions for the semiconductor industry.\u00ac\u2020 Our Clinic team is providing Etec with a feasibility study on a potential technology for tightening the focus point of a laser on the photoresist layer of a mask beyond the normal diffraction limit, enabling the writing of smaller mask features.\u00ac\u2020 We report both analytical and experimental results.<\/p>\n<p id=\"clinic-advisor\"><strong>Advisor(s):<\/strong> Peter N. Saeta.<\/p>\n","protected":false},"author":1,"featured_media":0,"template":"","class_list":["post-4913","physics_clinic","type-physics_clinic","status-publish","hentry"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.hmc.edu\/physics\/wp-json\/wp\/v2\/physics_clinic\/4913","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.hmc.edu\/physics\/wp-json\/wp\/v2\/physics_clinic"}],"about":[{"href":"https:\/\/www.hmc.edu\/physics\/wp-json\/wp\/v2\/types\/physics_clinic"}],"author":[{"embeddable":true,"href":"https:\/\/www.hmc.edu\/physics\/wp-json\/wp\/v2\/users\/1"}],"wp:attachment":[{"href":"https:\/\/www.hmc.edu\/physics\/wp-json\/wp\/v2\/media?parent=4913"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}