{"id":14037,"date":"2024-06-04T09:40:17","date_gmt":"2024-06-04T16:40:17","guid":{"rendered":"https:\/\/www.hmc.edu\/clinic\/?p=14037"},"modified":"2024-06-04T09:40:17","modified_gmt":"2024-06-04T16:40:17","slug":"ultra-high-vacuum-inspection-wafer","status":"publish","type":"post","link":"https:\/\/www.hmc.edu\/clinic\/2024\/ultra-high-vacuum-inspection-wafer\/","title":{"rendered":"Ultra-High Vacuum Inspection Wafer"},"content":{"rendered":"<h2 class=\"project-sponsor-dept-year\"><span class=\"project-sponsor\">Applied Materials, Inc.<\/span> <span class=\"project-dept-year\">Engineering, 2023\u201324<\/span><\/h2>\n<div class=\"project-team\">\n<p><strong>Liaison(s):<\/strong> Rikki Walters \u201920, Suhas Bangalore Umesh<br \/>\n<strong>Advisor(s):<\/strong> Tina Smilkstein<br \/>\n<strong>Students(s):<\/strong> Cecilia Li (TL-S), Javier Perez, Ruth Mueller (TL-F), Jovie Chen (S), Adam Medina (S), Zhian Zhou (S), Jackson Philion (F), Scarlett Bonner (F), Stephanie Allen (F)<\/p>\n<\/div>\n<div class=\"project-abstract\">\n<p>Applied Materials is the nation\u2019s leading semiconductor fabrication and development company. Their Endura machines are used to fabricate nanometer-sized features on silicon wafers, and during processing, the wafer is held in place by an electrostatic chuck. Over time, these chucks suffer flaws that could interfere with wafer fabrication. The Applied Materials Clinic team is developing a high-vacuum compatible device to easily inspect this chuck and monitor its wear with less chamber downtime.<\/p>\n<\/div>\n","protected":false},"excerpt":{"rendered":"<p>Applied Materials, Inc. Engineering, 2023\u201324 Liaison(s): Rikki Walters \u201920, Suhas Bangalore Umesh Advisor(s): Tina Smilkstein Students(s): Cecilia Li (TL-S), Javier [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[164],"tags":[709],"class_list":["post-14037","post","type-post","status-publish","format-standard","hentry","category-engineering","tag-applied-materials-inc"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.hmc.edu\/clinic\/wp-json\/wp\/v2\/posts\/14037","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.hmc.edu\/clinic\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.hmc.edu\/clinic\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.hmc.edu\/clinic\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.hmc.edu\/clinic\/wp-json\/wp\/v2\/comments?post=14037"}],"version-history":[{"count":1,"href":"https:\/\/www.hmc.edu\/clinic\/wp-json\/wp\/v2\/posts\/14037\/revisions"}],"predecessor-version":[{"id":14107,"href":"https:\/\/www.hmc.edu\/clinic\/wp-json\/wp\/v2\/posts\/14037\/revisions\/14107"}],"wp:attachment":[{"href":"https:\/\/www.hmc.edu\/clinic\/wp-json\/wp\/v2\/media?parent=14037"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.hmc.edu\/clinic\/wp-json\/wp\/v2\/categories?post=14037"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.hmc.edu\/clinic\/wp-json\/wp\/v2\/tags?post=14037"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}