{"id":12842,"date":"2001-01-01T00:00:00","date_gmt":"2001-01-01T08:00:00","guid":{"rendered":"https:\/\/www.hmc.edu\/clinic\/2001\/a-method-for-beating-the-diffraction-limit-in-photolithography\/"},"modified":"2001-01-01T00:00:00","modified_gmt":"2001-01-01T08:00:00","slug":"a-method-for-beating-the-diffraction-limit-in-photolithography","status":"publish","type":"post","link":"https:\/\/www.hmc.edu\/clinic\/2001\/a-method-for-beating-the-diffraction-limit-in-photolithography\/","title":{"rendered":"A Method for Beating the Diffraction Limit in Photolithography"},"content":{"rendered":"<h2 class=\"project-sponsor-dept-year\"><span class=\"project-sponsor\">Etec Systems, Inc., An Applied Materials Company<\/span> <span class=\"project-dept-year\">Physics, 2000-01<\/span><\/h2>\n<div class=\"project-team\">\n<p><strong>Liaison(s):<\/strong> Mike Bohan<br \/>\n<strong>Advisor(s):<\/strong> Peter Saeta<br \/>\n<strong>Students(s):<\/strong> Jamie Hadden (TL),  Andrew Batley,  Wilson Mui,  Libby Schoene,  John Walseth<\/p>\n<\/div>\n<div class=\"project-abstract\">\n<p>Etec Systems, Inc. is a worldwide leader in the designing, manufacturing, and marketing of mask-making solutions for the semiconductor industry. Our Clinic team is providing Etec with a feasibility study on a potential technology for tightening the focus point of a laser on the photoresist layer of a mask beyond the normal diffraction limit, enabling the writing of smaller mask features. We report both analytical and experimental results.<\/p>\n<\/div>\n","protected":false},"excerpt":{"rendered":"<p>Etec Systems, Inc., An Applied Materials Company Physics, 2000-01 Liaison(s): Mike Bohan Advisor(s): Peter Saeta Students(s): Jamie Hadden (TL), Andrew [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[161],"tags":[565],"class_list":["post-12842","post","type-post","status-publish","format-standard","hentry","category-physics","tag-etec-systems-inc-an-applied-materials-company"],"acf":[],"_links":{"self":[{"href":"https:\/\/www.hmc.edu\/clinic\/wp-json\/wp\/v2\/posts\/12842","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/www.hmc.edu\/clinic\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.hmc.edu\/clinic\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.hmc.edu\/clinic\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.hmc.edu\/clinic\/wp-json\/wp\/v2\/comments?post=12842"}],"version-history":[{"count":0,"href":"https:\/\/www.hmc.edu\/clinic\/wp-json\/wp\/v2\/posts\/12842\/revisions"}],"wp:attachment":[{"href":"https:\/\/www.hmc.edu\/clinic\/wp-json\/wp\/v2\/media?parent=12842"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.hmc.edu\/clinic\/wp-json\/wp\/v2\/categories?post=12842"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.hmc.edu\/clinic\/wp-json\/wp\/v2\/tags?post=12842"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}